JPH0439024B2 - - Google Patents

Info

Publication number
JPH0439024B2
JPH0439024B2 JP15171187A JP15171187A JPH0439024B2 JP H0439024 B2 JPH0439024 B2 JP H0439024B2 JP 15171187 A JP15171187 A JP 15171187A JP 15171187 A JP15171187 A JP 15171187A JP H0439024 B2 JPH0439024 B2 JP H0439024B2
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
measurement
center
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15171187A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63314431A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15171187A priority Critical patent/JPS63314431A/ja
Publication of JPS63314431A publication Critical patent/JPS63314431A/ja
Publication of JPH0439024B2 publication Critical patent/JPH0439024B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP15171187A 1987-06-18 1987-06-18 静電容量形差圧伝送器 Granted JPS63314431A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15171187A JPS63314431A (ja) 1987-06-18 1987-06-18 静電容量形差圧伝送器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15171187A JPS63314431A (ja) 1987-06-18 1987-06-18 静電容量形差圧伝送器

Publications (2)

Publication Number Publication Date
JPS63314431A JPS63314431A (ja) 1988-12-22
JPH0439024B2 true JPH0439024B2 (en]) 1992-06-26

Family

ID=15524603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15171187A Granted JPS63314431A (ja) 1987-06-18 1987-06-18 静電容量形差圧伝送器

Country Status (1)

Country Link
JP (1) JPS63314431A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056344U (ja) * 1991-07-10 1993-01-29 横河電機株式会社 差圧測定装置
JP6010439B2 (ja) * 2012-11-29 2016-10-19 アズビル株式会社 差圧センサ

Also Published As

Publication number Publication date
JPS63314431A (ja) 1988-12-22

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